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Influence of gaseous inclusions on aluminum-tungsten coatings investigated by XPS
- 2017 |
- Publications |
- Journals
Publication type:
Journal
Year:
2017
DOI:
http://dx.doi.org/10.1116/1.4998923 Journal data
Journal:
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Vol.:
35
Pag.:
61304