Surface modification and film deposition with expanding RF plasmas at atmospheric and low pressure

Publication type: 
Conference / Workshop
Authors: 
G. Dinescu
Number of authors: 
1
Year: 
2009

Conference / Workshop data

Conference / Workshop: 
16th International Summer School on Vacuum, Electron and Ion Technologies (VEIT 2009)
Location: 
Sunny Beach, Bulgaria
Period: 
27 september-2 October
Presentation method: 
invited lecture