Investigation of Radiofrequency expanding plasmas used for carbon layers deposition

Publication type: 
Conference / Workshop
Authors: 
S.D. Stoica, S. Vizireanu, B. Mitu, G. Dinescu
Number of authors: 
4
Year: 
2009

Conference / Workshop data

Conference / Workshop: 
Sixteenth International Summer School on Vacuum, Electron, and Ion Technologies
Location: 
Sunny Beach, Bulgaria
Period: 
September 28-2, 2009
Presentation method: 
Poster