HiPIMS deposition of silicon nitride for solar cell application

Publication type:

Journal

Authors:

Tiron, V; Velicu, IL; Pana, I; Cristea, D; Rusu, BG; Dinca, P; Porosnicu, C; Grigore, E; Munteanu, D; Tascu, S

Year:

2018

DOI:

http://dx.doi.org/10.4102/sajbm.v49i1.8

Book data

Pag.:

UNSP a8

Journal:

SURFACE & COATINGS TECHNOLOGY

Vol.:

344

Pag.:

UNSP a8