Excimer laser micro-machining optimization by using beam homogenizers based optical system

Publication type: 
Conference / Workshop
Authors: 
V. Sava, C. Ilie, M. Popa, M. Stoica, M. Udrea
Number of authors: 
5
Year: 
2009

Conference / Workshop data

Conference / Workshop: 
9th International Conference on Optics "Micro- to Nano-Photonics - ROMOPTO 2009"
Location: 
Sibiu, Romania
Period: 
31th August-3rd September 2009
Presentation method: 
Poster