Dopant-defect interactions in highly doped epitaxial Si:P thin films

Publication type:

Journal

Authors:

Weinrich, ZN; Li, X; Sharma, S; Craciun, V; Ahmed, M; Sanchez, EAC; Moffatt, S; Jones, KS

Year:

2019

DOI:

http://dx.doi.org/10.1016/j.tsf.2019.05.059

Journal data

Journal:

THIN SOLID FILMS

Vol.:

685

Pag.:

1 7