Growth of WOx from Tungsten(VI) Oxo-Fluoroalkoxide Complexes with Partially Fluorinated beta-Diketonate/beta-Ketoesterate Ligands: Comparison of Chemical Vapor Deposition to Aerosol-Assisted CVD

Publication type:

Journal

Authors:

Ou, NC; Bock, DC; Su, XM; Craciun, D; Craciun, V; McElwee-White, L

Year:

2019

DOI:

http://dx.doi.org/10.1021/acsami.9b08830

Journal data

Journal:

ACS APPLIED MATERIALS & INTERFACES

Vol.:

Pag.:

28180 28188