Rapid thermal annealing for high-quality ITO thin films deposited by radio-frequency magnetron sputtering

Publication type:

Journal

Authors:

Prepelita, P; Stavarache, I; Craciun, D; Garoi, F; Negrila, C; Sbarcea, BG; Craciun, V

Year:

2019

DOI:

http://dx.doi.org/10.3762/bjnano.10.149

Journal data

Journal:

BEILSTEIN JOURNAL OF NANOTECHNOLOGY

Vol.:

Pag.:

1511 1522