Annealing of preexisting defects in silicon single crystals by ion irradiation

Publication type:

Journal

Authors:

Mihai, MD; Ionescu, P; Pantelica, D; Petrascu, H; Craciun, D; Craciun, V; Vasiliu, F; Vasile, BS; Mercioniu, I

Year:

2019

DOI:

http://dx.doi.org/10.1016/j.nimb.2018.09.005

Journal data

Journal:

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Vol.:

450

Pag.:

85 89