Pulsed Laser Deposition of Aluminum Nitride Films: Correlation between Mechanical, Optical, and Structural Properties

Publication type:

Journal

Authors:

Kolaklieva, L; Chitanov, V; Szekeres, A; Antonova, K; Terziyska, P; Fogarassy, Z; Petrik, P; Mihailescu, IN; Duta, L

Year:

2019

DOI:

http://dx.doi.org/10.3390/coatings9030195

Journal data

Journal:

COATINGS

Vol.:

Pag.:

195