Energy-enhanced deposition of copper thin films by bipolar high power impulse magnetron sputtering

Publication type:

Journal

Authors:

Velicu, IL; Ianos, GT; Porosnicu, C; Mihaila, I; Burducea, I; Velea, A; Cristea, D; Munteanu, D; Tiron, V

Year:

2019

DOI:

http://dx.doi.org/10.1016/j.surfcoat.2018.12.079

Journal data

Journal:

SURFACE & COATINGS TECHNOLOGY

Vol.:

359

Pag.:

97 107