Surface morphology of AlN films synthesized by pulsed laser deposition

Publication type: 
Journal
Authors: 
Bakalova, S., Szekeres, A., Huhn, G., Havancsak, K., Grigorescu, S., Socol, G., Ristoscu, C., Mihailescu, I.N.
Number of authors: 
8
Year: 
2009

Journal data

Journal: 
Vacuum
Vol.: 
84(1)
Pag.: 
155-157
ISI factor: 
1.114