AlN thin films for piezoelectric devices

Publication type:

Conference / Workshop

Authors:

H. Stroescu, M. Anastasescu, L. Duta, I.N. Mihailescu, G.E. Stan, A. Szekeres, C. Moldovan, M. Zaharescu, M. Gartner

Year:

2019

Conference / Workshop data

Conference / Workshop:

E-MRS Spring Meeting

Location:

Nice, France

Presentation method:

oral presentation