Study of different metal oxides films for integration in piezoelectric microsystems

Publication type: 
Conference / Workshop
Authors: 
H. Stroescu, M. Anastasescu, M. Chelu, E. Tenea, D. Mitrea, P. Terziyska, A. Szekeres, C. Moldovan, L. Duta, I.N. Mihailescu, R. Birjega, I. Boierasu, M. Dinescu, G.E. Stan, M. Zaharescu, M. Gartner
Year: 
2019

Conference / Workshop data

Conference / Workshop: 
Twenty-First International Summer School On Vacuum, Electron And Ion Technologies (VEIT 2019)
Location: 
Sozopol, Bulgaria
Presentation method: 
oral presentation