Influence of the pulsed laser deposition conditions on the microstructure and mechanical properties of thin AlN films

Publication type:

Conference / Workshop

Authors:

A. Szekeres, A. Cziraki, Zs. Fogarassy, L. Kolaklieva, V. Chitanov, P. Terziyska, G.E. Stan, I.N. Mihailescu, L. Duta

Year:

2019

Conference / Workshop data

Conference / Workshop:

Twenty-First International Summer School On Vacuum, Electron And Ion Technologies (VEIT 2019)

Location:

Sozopol, Bulgaria

Presentation method:

poster presentation