Mass spectrometry investigation during magnetron sputtering of PTFE

Publication type:

Conference / Workshop

Authors:

S.D. Stoica, B. Mitu, V. Satulu, G. Dinescu

Year:

2019

Conference / Workshop data

Conference / Workshop:

XVIIIth International Conference on Plasma Physics and Application

Location:

Iasi, Romania

Period:

20th-22nd June

Presentation method:

poster presentation