Investigation of the chemical composition of the nanoscale polytetrafluoroethylene-like films deposited onto the surface of the track-etched membranes in vacuum.
Publication type:
Conference / Workshop
Year:
2019 Conference / Workshop data
Conference / Workshop:
Proc. of the XIV International Conference “Vacuum Equipment, Materials and Technology”, pages 156-161
Location:
Moscow, Russia
Period:
April 16-17, 2019