Study of a HPPMS discharge in Ar/O2 mixture: I. Discharge characteristics with Ru cathode

Publication type: 
Journal
Authors: 
D Benzeggouta, M C Hugon, J Bretagne and M Ganciu
Number of authors: 
4
Year: 
2009

Journal data

Journal: 
Plasma Sources Sci. Technol
Vol.: 
18
Pag.: 
45025
ISI factor: 
2.685