Characterization of C-Ti multilayer thin films obtained by TVA technology

Publication type:

Journal

Authors:

Ciupina, V; Lungu, CP; Vladoiu, R; Prodan, GC; Porosnicu, C; Vasile, E; Prodan, M; Nicolescu, V; Dinca, V; Manu, R; Cupsa, O; Velea, A

Year:

2020

DOI:

http://dx.doi.org/10.1117/12.2567927

Journal data

Journal:

NANOENGINEERING: FABRICATION, PROPERTIES, OPTICS, THIN FILMS, AND DEVICES XVII

Vol.:

11467

Pag.:

114671R