EFFECT OF NITROGEN CONTENT ON PHYSICAL AND MECHANICAL PROPERTIES OF TUNGSTEN FILMS DEPOSITED BY COMBINED MAGNETRON SPUTTERING AND ION IMPLANTATION

Publication type: 
Journal
Authors: 
Baiasu, F; Gherendi, M
Year: 
2020

Journal data

Journal: 
ROMANIAN REPORTS IN PHYSICS
Vol.: 
72
Issue: 
1
Pag.: 
404