TEM and AFM studies of aluminium nitride films synthesized by pulsed laser deposition

Publication type: 
Journal
Autori: 
Fogarassy, Z; Petrik, P; Duta, L; Mihailescu, IN; Anastasescu, M; Gartner, M; Antonova, K; Szekeres, A
Anul: 
2017
DOI: 
http://dx.doi.org/10.1007/s00339-017-1296-4

Journal data

Journal: 
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Vol.: 
123
Pag.: 
UNSP 756