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Deposition, Morphological, and Mechanical Evaluation of W and Be-Al2O3 and Er2O3 Co-Sputtered Films in Comparison with Pure Oxides
Publication type:
Journal
Anul:
2022
DOI:
http://dx.doi.org/10.3390/coatings11111430 Journal data
Journal:
COATINGS
Vol.:
11
Issue:
11
Pag.:
1430