Modelling the strain build-up in nitrogen implanted tungsten films on silicon substrates

Publication type: 
Conference / Workshop
Autori: 
Sérgio Magalhães, Rodrigo Mateus, Marta Dias, C. Porosnicu, O. G. Pompilian, Eduardo Alves
Anul: 
2022

Conference / Workshop data

Conference / Workshop: 
22th International Conference on Ion Beam Modification of Materals
Location: 
Lisabona, Portugalia
Period: 
10-15 July 2022
Presentation method: 
oral presentation