Mass spectra fitting as diagnostic tool for magnetron plasmas generated in Ar and Ar/H gases with tungsten targets

Publication type: 
Journal
Autori: 
C. Craciun, S.D. Stoica, B. Mitu, T. Acsente, G. Dinescu
Anul: 
2023
DOI: 
10.3390/molecules28155664

Journal data

Journal: 
Molecules
Vol.: 
28
Issue: 
15
Pag.: 
Article Number 5664