HiPIMS Ion Energy Distribution Measurements in Reactive Mode

Publication type:

Journal

Autori:

Jouan, PY; Le Brizoual, L; Ganciu, M; Cardinaud, C; Tricot, S; Djouadi, MA

Anul:

2010

DOI:

http://dx.doi.org/10.1109/TPS.2010.2073688

Journal data

Journal:

IEEE TRANSACTIONS ON PLASMA SCIENCE

Vol.:

Pag.:

3089 3094