HiPIMS Ion Energy Distribution Measurements in Reactive Mode

Publication type: 
Journal
Autori: 
Jouan, PY; Le Brizoual, L; Ganciu, M; Cardinaud, C; Tricot, S; Djouadi, MA
Anul: 
2010
DOI: 
http://dx.doi.org/10.1109/TPS.2010.2073688

Journal data

Journal: 
IEEE TRANSACTIONS ON PLASMA SCIENCE
Vol.: 
38
Pag.: 
3089 3094