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HiPIMS Ion Energy Distribution Measurements in Reactive Mode
- 2010 |
- Publications |
- Journals
Publication type:
Journal
Anul:
2010
DOI:
http://dx.doi.org/10.1109/TPS.2010.2073688 Journal data
Journal:
IEEE TRANSACTIONS ON PLASMA SCIENCE
Vol.:
38
Pag.:
3089 3094