Specificity of defects induced in silicon by RF-plasma hydrogenation

Publication type: 
Journal
Autori: 
Ghica, C; Nistor, LC; Stefan, M; Ghica, D; Mironov, B; Vizireanu, S; Moldovan, A; Dinescu, M
Anul: 
2010
DOI: 
http://dx.doi.org/10.1007/s00339-009-5527-1

Journal data

Journal: 
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Vol.: 
98
Pag.: 
777 785