Modification of AlN thin films morphology and structure by temporally shaping of fs laser pulses used for deposition

Publication type: 
Journal
Autori: 
Ristoscu, C; Ghica, C; Papadopoulou, EL; Socol, G; Gray, D; Mironov, B; Mihailescu, IN; Fotakis, C
Anul: 
2011
DOI: 
http://dx.doi.org/10.1016/j.tsf.2011.04.065

Journal data

Journal: 
THIN SOLID FILMS
Vol.: 
519
Pag.: 
6381 6387