OES monitoring of sequential deposition of C/W layers by PECVD/magnetron sputtering techniques

Publication type: 
Journal
Autori: 
Acsente, T; Ionita, ER; Stancu, C; Ionita, MD; Dinescu, G; Grisolia, C
Anul: 
2011
DOI: 
http://dx.doi.org/10.1016/j.surfcoat.2011.03.085

Journal data

Journal: 
SURFACE & COATINGS TECHNOLOGY
Vol.: 
205
Pag.: 
S402 S406