OES monitoring of sequential deposition of C/W layers by PECVD/magnetron sputtering techniques

Publication type:

Journal

Autori:

Acsente, T; Ionita, ER; Stancu, C; Ionita, MD; Dinescu, G; Grisolia, C

Anul:

2011

DOI:

http://dx.doi.org/10.1016/j.surfcoat.2011.03.085

Journal data

Journal:

SURFACE & COATINGS TECHNOLOGY

Vol.:

205

Pag.:

S402 S406