Investigation of chemical mechanical polishing of zinc oxide thin films

Publication type: 
Journal
Autori: 
Gupta, S; Kumar, P; Chakkaravathi, AA; Craciun, D; Singh, RK
Anul: 
2011
DOI: 
http://dx.doi.org/10.1016/j.apsusc.2011.01.116

Journal data

Journal: 
APPLIED SURFACE SCIENCE
Vol.: 
257
Pag.: 
5837 5843