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Simultaneous carbon and tungsten thin film deposition using two thermionic vacuum arcs
- 2011 |
- Publications |
- Journals
Publication type:
Journal
Anul:
2011
DOI:
http://dx.doi.org/10.1016/j.tsf.2011.01.192 Journal data
Journal:
THIN SOLID FILMS
Vol.:
519
Pag.:
4074 4077