Simultaneous carbon and tungsten thin film deposition using two thermionic vacuum arcs

Publication type:

Journal

Autori:

Marcu, A; Ticos, CM; Grigoriu, C; Jepu, I; Porosnicu, C; Lungu, AM; Lungu, CP

Anul:

2011

DOI:

http://dx.doi.org/10.1016/j.tsf.2011.01.192

Journal data

Journal:

THIN SOLID FILMS

Vol.:

519

Pag.:

4074 4077