Laser treatment of plasma-hydrogenated silicon wafers for thin layer exfoliation

Publication type:

Journal

Autori:

Ghica, C; Nistor, LC; Teodorescu, VS; Maraloiu, A; Vizireanu, S; Scarisoreanu, ND; Dinescu, M

Anul:

2011

DOI:

http://dx.doi.org/10.1063/1.3560538

Journal data

Journal:

JOURNAL OF APPLIED PHYSICS

Vol.:

109

Pag.:

63518