Laser treatment of plasma-hydrogenated silicon wafers for thin layer exfoliation

Publication type: 
Journal
Autori: 
Ghica, C; Nistor, LC; Teodorescu, VS; Maraloiu, A; Vizireanu, S; Scarisoreanu, ND; Dinescu, M
Anul: 
2011
DOI: 
http://dx.doi.org/10.1063/1.3560538

Journal data

Journal: 
JOURNAL OF APPLIED PHYSICS
Vol.: 
109
Pag.: 
63518