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SiO2-METAL CANTILEVER STRUCTURES UNDER THERMAL AND INTRINSIC STRESS
- 2011 |
- Publications |
- Journals
Publication type:
Journal
Anul:
2011 Journal data
Journal:
2011 INTERNATIONAL SEMICONDUCTOR CONFERENCE (CAS 2011), 34TH EDITION, VOLS 1 AND 2
Vol.:
0
Pag.:
167 170