PZT FILMS PREPARED BY TVA AND PLD FROM PbO2:TiO2:ZrO2 (1:1:1) NANOCERAMIC TARGETS

Savastru, D; Tenciu, D; Lungu, CP; Viespe, C; Grigoriu, C; Iordanescu, R; Feraru, ID; Ionescu, V; Monnereau, O; Tortet, L; Notonier, R; Grigorescu, CEA