Carbon-Tungsten Thin-Film Deposition by a Dual Thermionic Vacuum Arc

Publication type:

Journal

Autori:

Lungu, CP; Marcu, A; Porosnicu, C; Jepu, I; Kovac, J; Nemanic, V

Anul:

2012

DOI:

http://dx.doi.org/10.1109/TPS.2012.2218621

Journal data

Journal:

IEEE TRANSACTIONS ON PLASMA SCIENCE

Vol.:

Pag.:

3546 3551