Carbon-Tungsten Thin-Film Deposition by a Dual Thermionic Vacuum Arc

Publication type: 
Journal
Autori: 
Lungu, CP; Marcu, A; Porosnicu, C; Jepu, I; Kovac, J; Nemanic, V
Anul: 
2012
DOI: 
http://dx.doi.org/10.1109/TPS.2012.2218621

Journal data

Journal: 
IEEE TRANSACTIONS ON PLASMA SCIENCE
Vol.: 
40
Pag.: 
3546 3551