Very hard TiN thin films grown by pulsed laser deposition

Publication type: 
Journal
Autori: 
Craciun, D; Stefan, N; Socol, G; Dorcioman, G; McCumiskey, E; Hanna, M; Taylor, CR; Bourne, G; Lambers, E; Siebein, K; Craciun, V
Anul: 
2012
DOI: 
http://dx.doi.org/10.1016/j.apsusc.2011.11.128

Journal data

Journal: 
APPLIED SURFACE SCIENCE
Vol.: 
260
Pag.: 
2 6