Angular distribution of species in pulsed energy beam deposition of oxide films

Publication type: 
Journal
Autori: 
Nistor, M; Gherendi, F; Mandache, NB
Anul: 
2012
DOI: 
http://dx.doi.org/10.1016/j.apsusc.2012.01.164

Journal data

Journal: 
APPLIED SURFACE SCIENCE
Vol.: 
258
Pag.: 
9274 9277