R-3 measurement by White Light Interferometry

Publication type:

Journal

Autori:

Bojan, M; Apostol, D; Cernescu, N; Iordache, I; Damian, V; Schiopu, P

Anul:

2012

DOI:

http://dx.doi.org/10.1117/12.974491

Journal data

Journal:

ADVANCED TOPICS IN OPTOELECTRONICS, MICROELECTRONICS, AND NANOTECHNOLOGIES VI

Vol.:

8411

Pag.:

UNSP 841106