Silicon bump arrays by near-field enhanced femtosecond laser irradiation in fluorine liquid precursors

Publication type:

Journal

Autori:

Ulmeanu, M; Anghel, I; Jipa, F; Filipescu, M; Enculescu, M; Zamfirescu, M

Anul:

2013

DOI:

http://dx.doi.org/10.1016/j.apsusc.2013.01.050

Journal data

Journal:

APPLIED SURFACE SCIENCE

Vol.:

278

Pag.:

301 304