The effect of deposition atmosphere on the chemical composition of TiN and ZrN thin films grown by pulsed laser deposition

Publication type: 
Journal
Autori: 
Craciun, D; Socol, G; Stefan, N; Dorcioman, G; Hanna, M; Taylor, CR; Lambers, E; Craciun, V
Anul: 
2014
DOI: 
http://dx.doi.org/10.1016/j.apsusc.2013.10.095

Journal data

Journal: 
APPLIED SURFACE SCIENCE
Vol.: 
302
Pag.: 
124 128