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The effect of deposition atmosphere on the chemical composition of TiN and ZrN thin films grown by pulsed laser deposition
- 2014 |
- Publications |
- Journals
Publication type:
Journal
Anul:
2014
DOI:
http://dx.doi.org/10.1016/j.apsusc.2013.10.095 Journal data
Journal:
APPLIED SURFACE SCIENCE
Vol.:
302
Pag.:
124 128