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Composition and structure variation for magnetron sputtered tantalum oxynitride thin films, as function of deposition parameters
- 2015 |
- Publications |
- Journals
Publication type:
Journal
Anul:
2015
DOI:
http://dx.doi.org/10.1016/j.apsusc.2015.09.022 Journal data
Journal:
APPLIED SURFACE SCIENCE
Vol.:
358
Pag.:
508 517