Multi-stage pulsed laser deposition of aluminum nitride at different temperatures

Publication type: 
Journal
Autori: 
Duta, L; Stan, GE; Stroescu, H; Gartner, M; Anastasescu, M; Fogarassy, Z; Mihailescu, N; Szekeres, A; Bakalova, S; Mihailescu, IN
Anul: 
2016
DOI: 
http://dx.doi.org/10.1016/j.apsusc.2015.10.093

Journal data

Journal: 
APPLIED SURFACE SCIENCE
Vol.: 
374
Pag.: 
143 150