High atomic diffusivity during pulsed laser irradiation of TiON quasi-amorphous films

Publication type: 
Journal
Autori: 
Teodorescu, VS; Maraloiu, AV; Negrea, RF; Ghica, D; Scarisoreanu, ND; Dinescu, M; Gartner, M; Blanchin, MG
Anul: 
2016
DOI: 
http://dx.doi.org/10.1016/j.apsusc.2015.11.188

Journal data

Journal: 
APPLIED SURFACE SCIENCE
Vol.: 
374
Pag.: 
248 251