High atomic diffusivity during pulsed laser irradiation of TiON quasi-amorphous films
- 2016 |
- Publications |
- Journals
Publication type:
Journal
Anul:
2016
DOI:
http://dx.doi.org/10.1016/j.apsusc.2015.11.188 Journal data
Journal:
APPLIED SURFACE SCIENCE
Vol.:
374
Pag.:
248 251