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Investigations of Ar ion irradiation effects on nanocrystalline SiC thin films
- 2016 |
- Publications |
- Journals
Publication type:
Journal
Anul:
2016
DOI:
http://dx.doi.org/10.1016/j.apsusc.2015.12.130 Journal data
Journal:
APPLIED SURFACE SCIENCE
Vol.:
374
Pag.:
339 345