Characterization of hydrogenated and deuterated silicon carbide films codeposited by magnetron sputtering

Publication type: 
Journal
Autori: 
Pantelica, D; Ionescu, P; Petrascu, H; Dracea, MD; Statescu, M; Matei, E; Rasoga, O; Stancu, C; Marascu, V; Ion, V; Acsente, T; Dinescu, G
Anul: 
2016
DOI: 
http://dx.doi.org/10.1016/j.nimb.2015.10.060

Journal data

Journal: 
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Vol.: 
371
Pag.: 
322 326