Influence of laser pulse frequency on the microstructure of aluminum nitride thin films synthesized by pulsed laser deposition

Publication type: 
Journal
Autori: 
Antonova, K; Duta, L; Szekeres, A; Stan, GE; Mihailescu, IN; Anastasescu, M; Stroescu, H; Gartner, M
Anul: 
2017
DOI: 
http://dx.doi.org/10.1016/j.apsusc.2016.10.114

Journal data

Journal: 
APPLIED SURFACE SCIENCE
Vol.: 
394
Pag.: 
197 204