Properties of composite a-C:H/metal layers deposited by combined RF PECVD/Magnetron sputtering techniques
Publication type:
Conference / Workshop
Anul:
2010 Conference / Workshop data
Conference / Workshop:
European Materials Research Society (E-MRS 2010)
Location:
Strasbourg, France
Period:
June 7-11, 2010
Presentation method:
Poster Presentation