RF sputtering of oxide films in Ar and Ar-H2 gas mixtures: role of H incorporation in developing transparent conductive coatings
Publication type:
Conference / Workshop
Anul:
2010 Conference / Workshop data
Conference / Workshop:
12th International Conference on Plasma Surface Engineering (PSE 2010)
Location:
Garmish-Partenkirchen, Germany
Period:
13-17 September 2010
Presentation method:
Invited Presentation