Plasma diagnostics during synthesis of copper organosilicon composites films

Publication type: 
Conference / Workshop
Autori: 
B. Mitu, V. Satulu, G. Dinescu
Anul: 
2011

Conference / Workshop data

Conference / Workshop: 
19th International Symposium on Plasma Chemistry
Location: 
Philadelphia, USA
Period: 
July 24-29, 2011