Influence of H2 flow rate on the morphology of carbon films obtained by PECVD in a low pressure RF plasma jet

Publication type: 
Conference / Workshop
Autori: 
S.D. Stoica, S. Vizireanu, C.R. Luculescu, M. Bazavan, G. Dinescu
Anul: 
2016

Conference / Workshop data

Conference / Workshop: 
23rd Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG)
Location: 
Bratislava, Slovakia
Period: 
July 12-16