Influence of C2H2/H2 ratio on the plasma parameters and on the morphology of carbon films obtained by PECVD
Publication type:
Conference / Workshop
Anul:
2017 Conference / Workshop data
Conference / Workshop:
Conference on Plasma Physics and Applications
Location:
Magurele, Bucharest, Romania
Period:
15 - 20 June 2017
Presentation method:
Poster